3D Double Gate FinFET Construction of 30 nm Technology Node Impact Towards Short Channel Effect

per F. Roslan, Ameer, Salehuddin, F., M.Zain, A.S, Kaharudin, K.E, Hazura, H., Hanim, A.R, Idris, S. K, Zarina, B.Z, Maheran A.H, Afifah
Publicat 2018