3D Double Gate FinFET Construction of 30 nm Technology Node Impact Towards Short Channel Effect

af F. Roslan, Ameer, Salehuddin, F., M.Zain, A.S, Kaharudin, K.E, Hazura, H., Hanim, A.R, Idris, S. K, Zarina, B.Z, Maheran A.H, Afifah
Udgivet 2018