Entwicklung eines maskenlosen Fotolithographiesystems zum Einsatz im Rapid Prototyping in der Mikrofluidik und zur gezielten Oberflächenfunktionalisierung
In this work, a maskless lithography device based on a micro-mirror array was designed and built. Single projection frames are seamlessly projected next to each other. Microfluidic chips of several cm² size comprising channels of 50 µm have been built of various polymers via direct lithography and c...
Saved in:
| Main Author: | |
|---|---|
| Format: | Book Chapter |
| Published: |
KIT Scientific Publishing
2013
|
| Subjects: | |
| Online Access: | Get Fullteks DOAB: description of the publication |
| Tags: |
Add Tag
No Tags, Be the first to tag this record!
|
| Summary: | In this work, a maskless lithography device based on a micro-mirror array was designed and built. Single projection frames are seamlessly projected next to each other. Microfluidic chips of several cm² size comprising channels of 50 µm have been built of various polymers via direct lithography and casting. Also, bio-chemical ligand patterns comprising 256 different ligand densities have been created in a few seconds on a 5 mm² substrate with pixel sizes of a few µm. |
|---|---|
| Physical Description: | 1 electronic resource (XVI, 133 p. p.) |
| ISBN: | KSP/1000036845 9783731501190 |
| Access: | Open Access |