Entwicklung eines maskenlosen Fotolithographiesystems zum Einsatz im Rapid Prototyping in der Mikrofluidik und zur gezielten Oberflächenfunktionalisierung
In this work, a maskless lithography device based on a micro-mirror array was designed and built. Single projection frames are seamlessly projected next to each other. Microfluidic chips of several cm² size comprising channels of 50 µm have been built of various polymers via direct lithography and c...
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| Format: | Book Chapter |
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KIT Scientific Publishing
2013
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| Online Access: | Get Fullteks DOAB: description of the publication |
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| LEADER | 01632naaaa2200289uu 4500 | ||
|---|---|---|---|
| 001 | doab_20_500_12854_46578 | ||
| 005 | 20210211 | ||
| 020 | |a KSP/1000036845 | ||
| 020 | |a 9783731501190 | ||
| 024 | 7 | |a 10.5445/KSP/1000036845 |c doi | |
| 041 | 0 | |a German | |
| 042 | |a dc | ||
| 100 | 1 | |a Waldbaur, Ansgar |4 auth | |
| 245 | 1 | 0 | |a Entwicklung eines maskenlosen Fotolithographiesystems zum Einsatz im Rapid Prototyping in der Mikrofluidik und zur gezielten Oberflächenfunktionalisierung |
| 260 | |b KIT Scientific Publishing |c 2013 | ||
| 300 | |a 1 electronic resource (XVI, 133 p. p.) | ||
| 506 | 0 | |a Open Access |2 star |f Unrestricted online access | |
| 520 | |a In this work, a maskless lithography device based on a micro-mirror array was designed and built. Single projection frames are seamlessly projected next to each other. Microfluidic chips of several cm² size comprising channels of 50 µm have been built of various polymers via direct lithography and casting. Also, bio-chemical ligand patterns comprising 256 different ligand densities have been created in a few seconds on a 5 mm² substrate with pixel sizes of a few µm. | ||
| 540 | |a Creative Commons |f https://creativecommons.org/licenses/by-sa/4.0/ |2 cc |4 https://creativecommons.org/licenses/by-sa/4.0/ | ||
| 546 | |a German | ||
| 653 | |a Mikrofluidikchip | ||
| 653 | |a Rapid Prototyping | ||
| 653 | |a Mikrospiegelarray | ||
| 653 | |a Ligandenmuster | ||
| 653 | |a Lithographie | ||
| 856 | 4 | 0 | |a www.oapen.org |u https://www.ksp.kit.edu/9783731501190 |7 0 |z Get Fullteks |
| 856 | 4 | 0 | |a www.oapen.org |u https://directory.doabooks.org/handle/20.500.12854/46578 |7 0 |z DOAB: description of the publication |