Lithography
Lithography, the fundamental fabrication process of semiconductor devices, plays a critical role in micro- and nano-fabrications and the revolution in high density integrated circuits. This book is the result of inspirations and contributions from many researchers worldwide. Although the inclusion o...
Saved in:
Main Author: | Michael Wang (auth) |
---|---|
Format: | Book Chapter |
Published: |
IntechOpen
2010
|
Subjects: | |
Online Access: | Get Fullteks DOAB: description of the publication |
Tags: |
Add Tag
No Tags, Be the first to tag this record!
|
Similar Items
-
Advances in Chemical Sensors
by: Wen Wang
Published: (2012) -
Laser Scanning, Theory and Applications
by: Chau-Chang Wang
Published: (2011) -
Flexible Electronics
by: Simas Rackauskas
Published: (2018) -
Green Electronics
by: Dan Mihaiescu
Published: (2018) -
Polymer Thin Films
by: Abbass A Hashim
Published: (2010)