Novel Metal Electrodeposition and the Recent Application
Gold and noble metals have been attractive to humans from ancient times because of their beautiful features. In modern society, noble metals, especially gold, play important roles as components in electronic devices because of their high electrical conductivity, chemical stability, and density. In t...
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Format: | Book Chapter |
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IntechOpen
2019
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Online Access: | Get Fullteks DOAB: description of the publication |
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LEADER | 01928naaaa2200301uu 4500 | ||
---|---|---|---|
001 | doab_20_500_12854_54876 | ||
005 | 20210211 | ||
020 | |a intechopen.73382 | ||
020 | |a 9781789852967 | ||
020 | |a 9781789852950 | ||
024 | 7 | |a 10.5772/intechopen.73382 |c doi | |
041 | 0 | |a English | |
042 | |a dc | ||
100 | 1 | |a Masato Sone |4 auth | |
700 | 1 | |a Kazuya Masu |4 auth | |
245 | 1 | 0 | |a Novel Metal Electrodeposition and the Recent Application |
260 | |b IntechOpen |c 2019 | ||
300 | |a 1 electronic resource (168 p.) | ||
506 | 0 | |a Open Access |2 star |f Unrestricted online access | |
520 | |a Gold and noble metals have been attractive to humans from ancient times because of their beautiful features. In modern society, noble metals, especially gold, play important roles as components in electronic devices because of their high electrical conductivity, chemical stability, and density. In the field of MEMS devices, the demand for continuous miniaturization and sensitivity enhancement is always high. Especially for MEMS accelerometers, sensitivity is affected by Brownian noise, and components with sufficient mass are needed to suppress this noise. Therefore, it is difficult to reduce the dimensions of components to allow further miniaturization of the device. This book presents recent progress in noble metal electrodeposition and applications of gold-based materials in the realization of highly sensitive CMOS-MEMS accelerometers. | ||
540 | |a All rights reserved |4 http://oapen.org/content/about-rights | ||
546 | |a English | ||
653 | |a Physical Sciences | ||
653 | |a Engineering and Technology | ||
653 | |a Materials Science | ||
653 | |a Metals and Nonmetals | ||
856 | 4 | 0 | |a www.oapen.org |u https://www.intechopen.com/books/novel-metal-electrodeposition-and-the-recent-application |7 0 |z Get Fullteks |
856 | 4 | 0 | |a www.oapen.org |u https://directory.doabooks.org/handle/20.500.12854/54876 |7 0 |z DOAB: description of the publication |