Prozessentwicklung eines industrietauglichen Verfahrens zur Fertigung von vereinzelten LIGA-Mikrobauteilen
This work deals with the development of an industry suited process aiming on the fabrication (based on the LIGA technique) of near net shape, single microparts. Those microparts should lead to new innovative ideas and thus to successful products on the market.
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Main Author: | |
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Format: | Book Chapter |
Published: |
KIT Scientific Publishing
2015
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Subjects: | |
Online Access: | Get Fullteks DOAB: description of the publication |
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Summary: | This work deals with the development of an industry suited process aiming on the fabrication (based on the LIGA technique) of near net shape, single microparts. Those microparts should lead to new innovative ideas and thus to successful products on the market. |
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Physical Description: | 1 electronic resource (VII, 211 p. p.) |
ISBN: | KSP/1000045013 9783731503262 |
Access: | Open Access |