Prozessentwicklung eines industrietauglichen Verfahrens zur Fertigung von vereinzelten LIGA-Mikrobauteilen
This work deals with the development of an industry suited process aiming on the fabrication (based on the LIGA technique) of near net shape, single microparts. Those microparts should lead to new innovative ideas and thus to successful products on the market.
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| Format: | Book Chapter |
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KIT Scientific Publishing
2015
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| Online Access: | Get Fullteks DOAB: description of the publication |
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Get FullteksDOAB: description of the publication
3rd Floor Main Library
| Call Number: |
A1234.567 |
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| Copy 1 | Available |