Prozessentwicklung eines industrietauglichen Verfahrens zur Fertigung von vereinzelten LIGA-Mikrobauteilen

This work deals with the development of an industry suited process aiming on the fabrication (based on the LIGA technique) of near net shape, single microparts. Those microparts should lead to new innovative ideas and thus to successful products on the market.

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Bibliographic Details
Main Author: Heneka, Jochen (auth)
Format: Book Chapter
Published: KIT Scientific Publishing 2015
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DOAB: description of the publication
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