Superconducting Multilayer Technology for Josephson Devices : Technology, Engineering, Physics, Applications
Within this book fabrication processes for high-quality Josephson junctions based on niobium and aluminum oxide as well as niobium nitride and aluminum nitride on various substrates are discussed. Techniques for achieving a planar chip topography and sub-µm lateral dimensions, aiding the realization...
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| Format: | Book Chapter |
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KIT Scientific Publishing
2013
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| Online Access: | Get Fullteks DOAB: description of the publication |
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| LEADER | 01567naaaa2200289uu 4500 | ||
|---|---|---|---|
| 001 | doab_20_500_12854_60266 | ||
| 005 | 20210212 | ||
| 020 | |a KSP/1000036875 | ||
| 020 | |a 9783731501220 | ||
| 024 | 7 | |a 10.5445/KSP/1000036875 |c doi | |
| 041 | 0 | |a English | |
| 042 | |a dc | ||
| 100 | 1 | |a Meckbach, Johannes Maximilian |4 auth | |
| 245 | 1 | 0 | |a Superconducting Multilayer Technology for Josephson Devices : Technology, Engineering, Physics, Applications |
| 260 | |b KIT Scientific Publishing |c 2013 | ||
| 300 | |a 1 electronic resource (XIII, 175 p. p.) | ||
| 506 | 0 | |a Open Access |2 star |f Unrestricted online access | |
| 520 | |a Within this book fabrication processes for high-quality Josephson junctions based on niobium and aluminum oxide as well as niobium nitride and aluminum nitride on various substrates are discussed. Techniques for achieving a planar chip topography and sub-µm lateral dimensions, aiding the realization of sophisticated Josephson devices such as SQUIDs, flux-flow oscillators and long Josephson junctions with artificial phase discontinuities, are presented in detail. | ||
| 540 | |a Creative Commons |f https://creativecommons.org/licenses/by-sa/4.0/ |2 cc |4 https://creativecommons.org/licenses/by-sa/4.0/ | ||
| 546 | |a English | ||
| 653 | |a Superconductor | ||
| 653 | |a Quantum | ||
| 653 | |a Multilayer | ||
| 653 | |a Cryogenics | ||
| 653 | |a Josephson | ||
| 856 | 4 | 0 | |a www.oapen.org |u https://www.ksp.kit.edu/9783731501220 |7 0 |z Get Fullteks |
| 856 | 4 | 0 | |a www.oapen.org |u https://directory.doabooks.org/handle/20.500.12854/60266 |7 0 |z DOAB: description of the publication |