Superconducting Multilayer Technology for Josephson Devices : Technology, Engineering, Physics, Applications
Within this book fabrication processes for high-quality Josephson junctions based on niobium and aluminum oxide as well as niobium nitride and aluminum nitride on various substrates are discussed. Techniques for achieving a planar chip topography and sub-µm lateral dimensions, aiding the realization...
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Main Author: | Meckbach, Johannes Maximilian (auth) |
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Format: | Book Chapter |
Published: |
KIT Scientific Publishing
2013
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Subjects: | |
Online Access: | Get Fullteks DOAB: description of the publication |
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