Micromachining Techniques for Fabrication of Micro and Nano Structures
Micromachining is used to fabricate three-dimensional microstructures and it is the foundation of a technology called Micro-Electro-Mechanical-Systems (MEMS). Bulk micromachining and surface micromachining are two major categories (among others) in this field. This book presents advances in micromac...
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| Format: | Book Chapter |
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IntechOpen
2012
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| Online Access: | Get Fullteks DOAB: description of the publication |
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