Updates in Advanced Lithography
Advanced lithography grows up to several fields such as nano-lithography, micro electro-mechanical system (MEMS) and nano-phonics, etc. Nano-lithography reaches to 20 nm size in advanced electron device. Consequently, we have to study and develop true single nanometer size lithography. One of the so...
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IntechOpen
2013
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| Online Access: | Get Fullteks DOAB: description of the publication |
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|---|---|---|---|
| 001 | doab_20_500_12854_66578 | ||
| 005 | 20210420 | ||
| 020 | |a 3348 | ||
| 020 | |a 9789535111757 | ||
| 020 | |a 9789535157090 | ||
| 024 | 7 | |a 10.5772/3348 |c doi | |
| 041 | 0 | |a English | |
| 042 | |a dc | ||
| 072 | 7 | |a PHFC |2 bicssc | |
| 100 | 1 | |a Hosaka, Sumio |4 edt | |
| 700 | 1 | |a Hosaka, Sumio |4 oth | |
| 245 | 1 | 0 | |a Updates in Advanced Lithography |
| 260 | |b IntechOpen |c 2013 | ||
| 300 | |a 1 electronic resource (262 p.) | ||
| 506 | 0 | |a Open Access |2 star |f Unrestricted online access | |
| 520 | |a Advanced lithography grows up to several fields such as nano-lithography, micro electro-mechanical system (MEMS) and nano-phonics, etc. Nano-lithography reaches to 20 nm size in advanced electron device. Consequently, we have to study and develop true single nanometer size lithography. One of the solutions is to study a fusion of top down and bottom up technologies such as EB drawing and self-assembly with block copolymer. In MEMS and nano-photonics, 3 dimensional structures are needed to achieve some functions in the devices for the applications. Their formation are done by several methods such as colloid lithography, stereo-lithography, dry etching, sputtering, deposition, etc. This book covers a wide area regarding nano-lithography, nano structure and 3-dimensional structure, and introduces readers to the methods, methodology and its applications. | ||
| 540 | |a Creative Commons |f https://creativecommons.org/licenses/by/3.0/ |2 cc |4 https://creativecommons.org/licenses/by/3.0/ | ||
| 546 | |a English | ||
| 650 | 7 | |a Condensed matter physics (liquid state & solid state physics) |2 bicssc | |
| 653 | |a Condensed matter physics (liquid state & solid state physics) | ||
| 856 | 4 | 0 | |a www.oapen.org |u https://mts.intechopen.com/storage/books/3071/authors_book/authors_book.pdf |7 0 |z Get Fullteks |
| 856 | 4 | 0 | |a www.oapen.org |u https://directory.doabooks.org/handle/20.500.12854/66578 |7 0 |z DOAB: description of the publication |