Advanced Strategies in Thin Film Engineering by Magnetron Sputtering
Recent years have witnessed the flourishing of numerous novel strategies based on the magnetron sputtering technique aimed at the advanced engineering of thin films, such as HiPIMS, combined vacuum processes, the implementation of complex precursor gases or the inclusion of particle guns in the reac...
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| Format: | Book Chapter |
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Basel, Switzerland
MDPI - Multidisciplinary Digital Publishing Institute
2020
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| Online dostop: | Get Fullteks DOAB: description of the publication |
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