Advanced Strategies in Thin Film Engineering by Magnetron Sputtering
Recent years have witnessed the flourishing of numerous novel strategies based on the magnetron sputtering technique aimed at the advanced engineering of thin films, such as HiPIMS, combined vacuum processes, the implementation of complex precursor gases or the inclusion of particle guns in the reac...
Saved in:
| 其他作者: | , |
|---|---|
| 格式: | 本书章节 |
| 出版: |
Basel, Switzerland
MDPI - Multidisciplinary Digital Publishing Institute
2020
|
| 主题: | |
| 在线阅读: | Get Fullteks DOAB: description of the publication |
| 标签: |
添加标签
没有标签, 成为第一个标记此记录!
|
因特网
Get FullteksDOAB: description of the publication
3rd Floor Main Library
| 索引号: |
A1234.567 |
|---|---|
| 复印件 1 | 可用 |