Langzeitstabilität der Innendrücke von Kavernen benachbarter MEMS-Sensoren auf Siliziumbasis
Due to a trend towards miniaturization of many MEMS devices and thus also the cavity volumes of inertial sensors, the influence of slight changes in the damping atmosphere in sensor cavities on the reliability of the sensors is increasing. In this work, mechanisms affecting the pressure stability of...
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| Format: | Book Chapter |
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Karlsruhe
KIT Scientific Publishing
2022
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| Online Access: | Get Fullteks DOAB: description of the publication |
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