3D Double Gate FinFET Construction of 30 nm Technology Node Impact Towards Short Channel Effect
This paper presents an investigation on properties of Double Gate FinFET (DGFinFET) and impact of physical properties of FinFET towards short channel effects (SCEs) for 30 nm device, where depletion-layer widths of the source-drain corresponds to the channel length aside from constant fin height (HF...
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| Hoofdauteurs: | , , , , , , , , |
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| Formaat: | EJournal Article |
| Gepubliceerd in: |
Institute of Advanced Engineering and Science,
2018-12-01.
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| Onderwerpen: | |
| Online toegang: | Get fulltext |
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| Plaatsingsnummer: |
A1234.567 |
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| Kopie 1 | Beschikbaar |