Digital Control of Active Network Microstructures on Silicon Wafers
This chapter presents a promising digital control of active microstructures developed and tested on silicon chips by current division and thus independent Joule heating powers, especially for planar submillimeter two-dimensional (2-D) grid microstructures built on silicon wafers by surface microfabr...
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| Main Authors: | , , |
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| Format: | Ebooks |
| Published: |
IntechOpen,
2021-12-07.
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| Subjects: | |
| Online Access: | Get Online |
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