Nanomachining of Fused Quartz Using Atomic Force Microscope
Nanomachining experiments on fused quartz surface have been performed using an atomic force microscope combined with a two-axis capacitive force/displacement transducer. The minimum normal force fnP needed to form reproducibly a groove was about 4.7 μN. The minimum critical normal force fnR, tangent...
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IntechOpen,
2016-07-27.
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