Milliwatt-Level Electromagnetic Induction-Type MEMS Air Turbine Generator
In this chapter, an electromagnetic induction-type MEMS air turbine generator that combined with the MEMS technology and the multilayer ceramic technology is proposed. Three types of MEMS air turbine generators that included the different bearing systems, shape of the rotor and shape of the magnetic...
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| Format: | Ebooks |
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IntechOpen,
2018-07-18.
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| Summary: | In this chapter, an electromagnetic induction-type MEMS air turbine generator that combined with the MEMS technology and the multilayer ceramic technology is proposed. Three types of MEMS air turbine generators that included the different bearing systems, shape of the rotor and shape of the magnetic circuits are discussed to achieve the high output power. In the MEMS air turbine, the purpose is to achieve high-speed rotational motion. As a result of the comparison between the different structures, a rim-type rotor and a miniature ball bearing system showed the high rotational speed than a flat-type rotor and a fluid dynamic bearing system. The maximum rotational speed of the fabricated air turbine was 290,135 rpm. Moreover, it is important to introduce the magnetic flux to the magnetic circuit. By the multilayer ceramic technology, the three-dimensional coil in miniature monolithic structure was fabricated. The magnetic core that was designed to introduce the magnetic flux showed the low magnetic flux loss. The fabricated MEMS air turbine and the multilayer ceramic magnetic circuit were combined, and the miniature electromagnetic induction-type generator was achieved. The output power was 2.41 mVA, when the load resistance and the output voltage were 8 Ω and 139 mV, respectively. |
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| Item Description: | https://mts.intechopen.com/articles/show/title/milliwatt-level-electromagnetic-induction-type-mems-air-turbine-generator |