Nanoparticle Engineering for Chemical-Mechanical Planarization: Fabrication of Next-Generation Nanodevices
Increasing reliance on electronic devices demands products with high performance and efficiency. Such devices can be realized through the advent of nanoparticle technology. This book explains the physicochemical properties of nanoparticles according to each step in the chemical mechanical planarizat...
Saved in:
Main Authors: | , |
---|---|
Format: | Ebooks |
Subjects: | |
Online Access: | Get Fulltext |
Tags: |
Add Tag
No Tags, Be the first to tag this record!
|
Be the first to leave a comment!