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1by Pancrazio, JosephSubjects: “…micro-electromechanical systems (MEMS) technologies…”
Published 2019
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2by Baldas, LucienSubjects: “…resonant micro-electromechanical-systems (MEMS)…”
Published 2019
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3Published 2020Subjects: “…micro electromechanical systems (MEMS)…”
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DOAB: description of the publication
Book Chapter