Development of CMOS-MEMS/NEMS Devices

Development of CMOS-MEMS/NEMS Devices

Micro and nano-electro-mechanical system (M/NEMS) devices constitute key technological building blocks to enable increased additional functionalities within Integrated Circuits (ICs) in the More-Than-Moore era, as described in the International Technology Roadmap for Semiconductors. The CMOS ICs and...

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Detalhes bibliográficos
Autor principal: Verd, Jaume (auth)
Outros Autores: Segura, Jaume (auth)
Formato: Capítulo de Livro
Publicado em: MDPI - Multidisciplinary Digital Publishing Institute 2019
Assuntos:
encapsulation
n/a
NEM memory switch
magnetotransistor
gas sensor
nano-system array
metal oxide (MOX) sensor
capacitive pressure sensor
real-time temperature compensation loop
mechanical relays
single-crystal silicon (SC-Si)
MEMS relays
MEMS
oscillator
micro-electro-mechanical system (MEMS)
uncooled IR-bolometer
microelectromechanical systems
microbolometer
programmable sustaining amplifier
micro sensor
CMOS-MEMS
pierce oscillator
MEMS resonators
micro/nanoelectromechanical systems (MEMS/NEMS)
resonator
microhotplate
NEMS
application-specific integrated circuit (ASIC)
MEMS modelling
magnetic field
chopper instrumentation amplifier
microresonators
interface circuit
Hall effect
thermal detector
temperature sensor
infrared sensor
CMOS-NEMS
CMOS
atomic force microscope
MEMS switches
stent
micro-electro-mechanical systems (MEMS) sensors
nano resonator
silicon-on-insulator (SOI)
MEMS-ASIC integration
Sigma-Delta
MEMS characterization
high-Q capacitive accelerometer
mass sensors
M3D
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