Laser-Based Nano Fabrication and Nano Lithography
The improvement of fabrication resolutions is an eternal challenge for miniaturizing and enhancing the integration degrees of devices. Laser processing is one of the most widely used techniques in manufacturing due to its high flexibility, high speed, and environmental friendliness. The fabrication...
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| Format: | Book Chapter |
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MDPI - Multidisciplinary Digital Publishing Institute
2018
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| Online Access: | Get Fullteks DOAB: description of the publication |
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Get FullteksDOAB: description of the publication
3rd Floor Main Library
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A1234.567 |
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| Copy 1 | Available |