Piezoelectric MEMS

Electromechanical transducers based on piezoelectric layers and thin films are continuously finding their way into micro-electromechanical systems (MEMS). Piezoelectric transducers feature a linear voltage response, no snap-in behavior and can provide both attractive and repulsive forces. This remov...

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Bibliografski detalji
Glavni autor: Ulrich Schmid (Ed.) (auth)
Daljnji autori: Michael Schneider (Ed.) (auth)
Format: Poglavlje knjige
Izdano: MDPI - Multidisciplinary Digital Publishing Institute 2018
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