Piezoelectric MEMS
Electromechanical transducers based on piezoelectric layers and thin films are continuously finding their way into micro-electromechanical systems (MEMS). Piezoelectric transducers feature a linear voltage response, no snap-in behavior and can provide both attractive and repulsive forces. This remov...
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Format: | Book Chapter |
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MDPI - Multidisciplinary Digital Publishing Institute
2018
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Online Access: | Get Fullteks DOAB: description of the publication |
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Get FullteksDOAB: description of the publication
3rd Floor Main Library
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A1234.567 |
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Copy 1 | Available |