Microelectromechanical Systems and Devices
The advances of microelectromechanical systems (MEMS) and devices have been instrumental in the demonstration of new devices and applications, and even in the creation of new fields of research and development: bioMEMS, actuators, microfluidic devices, RF and optical MEMS. Experience indicates a nee...
Saved in:
| Other Authors: | |
|---|---|
| Format: | Book Chapter |
| Published: |
IntechOpen
2012
|
| Subjects: | |
| Online Access: | Get Fullteks DOAB: description of the publication |
| Tags: |
Add Tag
No Tags, Be the first to tag this record!
|
Internet
Get FullteksDOAB: description of the publication
3rd Floor Main Library
| Call Number: |
A1234.567 |
|---|---|
| Copy 1 | Available |