Advances in Micro/Nano Electromechanical Systems and Fabrication Technologies
MEMS technology is increasingly penetrating into our lives and improving our quality of life. In parallel to this, advances in nanotechnology and nanomaterials have been catalyzing the rise of NEMS. Consisting of nine chapters reviewing state-of-the-art technologies and their future trends, this boo...
Saved in:
Other Authors: | |
---|---|
Format: | Book Chapter |
Published: |
IntechOpen
2013
|
Subjects: | |
Online Access: | Get Fullteks DOAB: description of the publication |
Tags: |
Add Tag
No Tags, Be the first to tag this record!
|
Internet
Get FullteksDOAB: description of the publication
3rd Floor Main Library
Call Number: |
A1234.567 |
---|---|
Copy 1 | Available |