Micro- and Nano-Fabrication by Metal Assisted Chemical Etching
Metal-assisted chemical etching (MacEtch) has recently emerged as a new etching technique capable of fabricating high aspect ratio nano- and microstructures in a few semiconductors substrates-Si, Ge, poly-Si, GaAs, and SiC-and using different catalysts-Ag, Au, Pt, Pd, Cu, Ni, and Rh. Several shapes...
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Formaat: | Hoofdstuk |
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Basel, Switzerland
MDPI - Multidisciplinary Digital Publishing Institute
2021
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Online toegang: | Get Fullteks DOAB: description of the publication |
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Get FullteksDOAB: description of the publication
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A1234.567 |
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Kopie 1 | Beschikbaar |