Development of photodiode via the rapid melt growth (RMG) materials for energy conversion device
Germanium (Ge) photodiodes were fabricated with the new RMG crucible materials that were established in this study. Results show that Ge large square patterns with size of 208 µm x 208 µm were unable to be achieved if ion implantation process was used in formation of photodiode. Delamination can be...
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| Main Authors: | , , , |
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| Format: | EJournal Article |
| Published: |
Institute of Advanced Engineering and Science,
2020-06-01.
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| Subjects: | |
| Online Access: | Get fulltext |
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| Call Number: |
A1234.567 |
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| Copy 1 | Available |