Optimization of 16 nm DG-FinFET using L25 orthogonal array of taguchi statistical method

The impact of the optimization using Taguchi statistical method towards the electrical properties of a 16 nm double-gate FinFET (DG-FinFET) is investigated and analyzed. The inclusion of drive current (ION), leakage current (IOFF), and threshold voltage (VTH) as part of electrical properties present...

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Main Authors: Roslan, Ameer F. (Author), Salehuddin, F. (Author), Zain, A.S.M (Author), Kaharudin, K.E (Author), Ahmad, I. (Author)
Format: EJournal Article
Published: Institute of Advanced Engineering and Science, 2020-06-01.
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