Plasma-Enhanced Chemical Vapor Deposition: Where we are and the Outlook for the Future
Chemical vapor deposition (CVD) is a technique for the fabrication of thin films of polymeric materials, which has successfully overcome some of the issues faced by wet chemical fabrication and other deposition methods. There are many hybrid techniques, which arise from CVD and are constantly evolvi...
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| Main Authors: | , , , , |
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| Format: | Ebooks |
| Published: |
IntechOpen,
2016-08-31.
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| Subjects: | |
| Online Access: | Get Online |
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Internet
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| Call Number: |
A1234.567 |
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| Copy 1 | Available |