Operando Structural Characterization of the E-ALD Process Ultra-Thin Films Growth
Spanning from nanoelectronics to new solar energy materials, technological development in the recent years requested highly controlled nanostructured surfaces, ultra-thin films, and 2D structured materials. In general, although very favorable from a full life cycle assessment (FLCA) standpoint, elec...
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| Main Authors: | , , |
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| Format: | Ebooks |
| Published: |
IntechOpen,
2017-03-22.
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| Subjects: | |
| Online Access: | Get Online |
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Internet
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| Call Number: |
A1234.567 |
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| Copy 1 | Available |