Diamond, Diamond-Like Carbon (DLC) and Diamond-Like Nanocomposite (DLN) Thin Films for MEMS Applications

Diamond, Diamond-Like Carbon (DLC) and Diamond-Like Nanocomposite (DLN) Thin Films for MEMS Applications

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Bibliographic Details
Main Authors: T. S. Santra (Author), T. K. Bhattacharyya (Author), P. Patel (Author), F. G. Tseng (Author), T. K. Barik (Author)
Format: Ebooks
Published: IntechOpen, 2012-03-28.
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Chapter, Part Of Book
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