Diamond, Diamond-Like Carbon (DLC) and Diamond-Like Nanocomposite (DLN) Thin Films for MEMS Applications

Diamond, Diamond-Like Carbon (DLC) and Diamond-Like Nanocomposite (DLN) Thin Films for MEMS Applications

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Bibliographic Details
Main Authors: T. S. Santra (Author), T. K. Bhattacharyya (Author), P. Patel (Author), F. G. Tseng (Author), T. K. Barik (Author)
Format: Ebooks
Published: IntechOpen, 2012-03-28.
Subjects:
Chapter, Part Of Book
Online Access:Get Online
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Item Description:https://mts.intechopen.com/articles/show/title/diamond-diamond-like-carbon-dlc-and-diamond-like-nanocomposite-dln-thin-films-for-mems-applications-

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