Diamond, Diamond-Like Carbon (DLC) and Diamond-Like Nanocomposite (DLN) Thin Films for MEMS Applications
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| Main Authors: | , , , , |
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| Format: | Ebooks |
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IntechOpen,
2012-03-28.
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| Subjects: | |
| Online Access: | Get Online |
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| LEADER | 01043 am a22002293u 4500 | ||
|---|---|---|---|
| 001 | intechopen_books_853 | ||
| 042 | |a dc | ||
| 100 | 1 | 0 | |a T. S. Santra |e author |
| 700 | 1 | 0 | |a T. K. Bhattacharyya |e author |
| 700 | 1 | 0 | |a P. Patel |e author |
| 700 | 1 | 0 | |a F. G. Tseng |e author |
| 700 | 1 | 0 | |a T. K. Barik |e author |
| 245 | 0 | 0 | |a Diamond, Diamond-Like Carbon (DLC) and Diamond-Like Nanocomposite (DLN) Thin Films for MEMS Applications |
| 260 | |b IntechOpen, |c 2012-03-28. | ||
| 500 | |a https://mts.intechopen.com/articles/show/title/diamond-diamond-like-carbon-dlc-and-diamond-like-nanocomposite-dln-thin-films-for-mems-applications- | ||
| 540 | |a https://creativecommons.org/licenses/by/3.0/ | ||
| 546 | |a en | ||
| 690 | |a Microelectromechanical Systems and Devices | ||
| 655 | 7 | |a Chapter, Part Of Book |2 local | |
| 786 | 0 | |n https://www.intechopen.com/books/853 | |
| 787 | 0 | |n ISBN:978-953-51-0306-6 | |
| 856 | \ | \ | |u https://mts.intechopen.com/articles/show/title/diamond-diamond-like-carbon-dlc-and-diamond-like-nanocomposite-dln-thin-films-for-mems-applications- |z Get Online |